Atomic layer deposition Atomic layer deposition (ALD) Atomic-layer deposition Computer circuits Drain current GaInAs High electron mobility transistors Impact ionization Inverse subthreshold slope Inverse subthreshold slopes Logic gates MOS devices MOS-FET MOSFET MOSFET devices MOSFETs RF performance Semiconductor alloys Steep slope impact ionization inverse subthreshold slope (SS) steep slope Clocks Cutoff frequency Digital devices Display devices Energy consumption Energy gap Energy utilization Energy-consumption