Atomic-layer deposition Atomic layer deposition 5 Atomic layer deposition (ALD) 2 Computer circuits 2 Drain current 2 GaInAs 2 Hafnium oxides 2 High electron mobility transistors 2 III-V semiconductors 2 Impact ionization 2 Inverse subthreshold slope 2 Inverse subthreshold slopes 2 Logic gates 2 MOS devices 2 MOS-FET 2 MOSFET 2 MOSFET devices 2 MOSFETs 2 RF performance 2 Semiconductor alloys 2 Steep slope 2 Surface reactions 2 impact ionization 2 inverse subthreshold slope (SS) 2 steep slope 2 2D-hexagonal 1 AFM 1 Alumina 1 Aluminum nitride 1 Aluminum oxide 1