Impact ionization MOS devices 3 Atomic layer deposition 2 Atomic layer deposition (ALD) 2 Atomic-layer deposition 2 Computer circuits 2 Drain current 2 GaInAs 2 High electron mobility transistors 2 Inverse subthreshold slope 2 Inverse subthreshold slopes 2 Logic gates 2 MOS-FET 2 MOSFET 2 MOSFET devices 2 MOSFETs 2 RF performance 2 Semiconductor alloys 2 Steep slope 2 Threshold voltage 2 impact ionization 2 inverse subthreshold slope (SS) 2 steep slope 2 Argon 1 Argon gas 1 Atmospheric argon 1 Carrier concentration 1 Clocks 1 Cutoff frequency 1 Degradation 1