Atomic layer deposition 2 Atomic layer deposition (ALD) 2 Atomic-layer deposition 2 Computer circuits 2 Drain current 2 GaInAs High electron mobility transistors 2 Impact ionization 2 Inverse subthreshold slope 2 Inverse subthreshold slopes 2 Logic gates 2 MOS devices 2 MOS-FET 2 MOSFET 2 MOSFET devices 2 MOSFETs 2 RF performance 2 Semiconductor alloys 2 Steep slope 2 impact ionization 2 inverse subthreshold slope (SS) 2 steep slope 2 Clocks 1 Cutoff frequency 1 Digital devices 1 Display devices 1 Energy consumption 1 Energy gap 1 Energy utilization 1 Energy-consumption 1