Determination of Multiple Spring Constants, Gaps and Pull Down Voltages in MEMS CRAB Type Microaccelerometer Using Near Pull Down Capacitance Voltage Measurements

Determination of Multiple Spring Constants, Gaps and Pull Down Voltages in MEMS CRAB Type Microaccelerometer Using Near Pull Down Capacitance Voltage Measurements

A simple experimental method based on capacitance voltage (CV) measurements is presented to extract the spring constants (k) different actuation voltages and gaps, in crab type capacitive MEMS accelerometer sensors. It is shown that in addition to main spring action provided by the legs of the struc...

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Bibliographic Details
Main Authors: R. K. Bhan, Shaveta, Abha Panchal, Yashoda Parmar, Chandan Sharma, Ramjai Pal, Shankar Dutta
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2015-09-01
Series:Sensors & Transducers
Subjects:
Accelerometer
MEMS sensors
Capacitance Voltage
Spring constants
Pull down voltage.
Online Access:http://www.sensorsportal.com/HTML/DIGEST/september_2015/Vol_192/P_2722.pdf

Internet

http://www.sensorsportal.com/HTML/DIGEST/september_2015/Vol_192/P_2722.pdf

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