An Improved Analytical Approach for Estimation of Misalignment Error of Sensing Axis in MEMS Accelerometers using Simple Tilt Measurements

by R. K. Bhan, Shaveta Imran, Ramjai Pal, Shankar Dutta
Published 2015-06-01

Determination of Multiple Spring Constants, Gaps and Pull Down Voltages in MEMS CRAB Type Microaccelerometer Using Near Pull Down Capacitance Voltage Measurements

by R. K. Bhan, Shaveta, Abha Panchal, Yashoda Parmar, Chandan Sharma, Ramjai Pal, Shankar Dutta
Published 2015-09-01