Scattering Parameters of Broadband (18 – 40 GHz) RF MEMS Switch in p-match Configuration

by Updesh SHARMA, Shankar DUTTA, E. K. SHARMA
Published 2016-01-01

An Improved Analytical Approach for Estimation of Misalignment Error of Sensing Axis in MEMS Accelerometers using Simple Tilt Measurements

by R. K. Bhan, Shaveta Imran, Ramjai Pal, Shankar Dutta
Published 2015-06-01

Development of Unified Fabrication Process and Testing of MEMS Based Comb and Crab Type Capacitive Accelerometers for Navigational Applications

by R. K. Bhan, Shaveta Imran, Ramjay Pal, Shankar Dutta, Isha Yadav
Published 2016-08-01

Design and Analysis of Wet Etching Based Comb Type Capacitive Accelerometer

by Shankar DUTTA, Shaveta, R. PAL, D.K. BHATTACHARYA, P. DATTA, R. CHATTERJEE
Published 2008-04-01

Determination of Multiple Spring Constants, Gaps and Pull Down Voltages in MEMS CRAB Type Microaccelerometer Using Near Pull Down Capacitance Voltage Measurements

by R. K. Bhan, Shaveta, Abha Panchal, Yashoda Parmar, Chandan Sharma, Ramjai Pal, Shankar Dutta
Published 2015-09-01

Fabrication Challenges for Realization of Wet Etching Based Comb Type Capacitive Microaccelerometer Structure

by Shankar DUTTA, R. PAL, P. KUMAR, O. P. HOODA, J. SINGH, Shaveta, G. SAXENA, P. DATTA, R. CHATTERJEE
Published 2009-12-01