Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes

Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes

We present a new micro Hall effect measurement method using non-equidistant electrodes. We show theoretically and verify experimentally that it is advantageous to use non-equidistant electrodes for samples with low Hall sheet resistance. We demonstrate the new method by experiments where Hall sheet...

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Bibliographic Details
Main Authors: Frederik Westergaard Østerberg, Maria-Louise Witthøft, Shibesh Dutta, Johan Meersschaut, Christoph Adelmann, Peter Folmer Nielsen, Ole Hansen, Dirch Hjorth Petersen
Format: Article
Language:English
Published: AIP Publishing LLC 2018-05-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5010399

Internet

http://dx.doi.org/10.1063/1.5010399

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