A variable probe pitch micro-Hall effect method

by Maria-Louise Witthøft, Frederik W. Østerberg, Janusz Bogdanowicz, Rong Lin, Henrik H. Henrichsen, Ole Hansen, Dirch H. Petersen
Published 2018-07-01

Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes

by Frederik Westergaard Østerberg, Maria-Louise Witthøft, Shibesh Dutta, Johan Meersschaut, Christoph Adelmann, Peter Folmer Nielsen, Ole Hansen, Dirch Hjorth Petersen
Published 2018-05-01