Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes

by Frederik Westergaard Østerberg, Maria-Louise Witthøft, Shibesh Dutta, Johan Meersschaut, Christoph Adelmann, Peter Folmer Nielsen, Ole Hansen, Dirch Hjorth Petersen
Published 2018-05-01