Wet etching of platinum (Pt) electrodes for piezoelectric transducers using a thick photoresist mask
Platinum (Pt) is widely used in MEMS applications due to its inert nature and high temperature stability. In general, Pt is patterned using dry etching methods which require expensive machinery. In this study, we propose wet etching of Pt electrodes of piezoelectric transducers in hot Aqua Regia at...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier B.V.
2022
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| Subjects: | |
| Online Access: | View Fulltext in Publisher |