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Koyuncuoğlu, A.
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Koyuncuoğlu, A.
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Wet etching of platinum (Pt) electrodes for piezoelectric transducers using a thick photoresist mask
by
Işık Akçakaya, D.
,
Koyuncuoğlu
,
A
.
,
Külah, H.
,
Şardan Sukas, Ö
Published 2022
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Related Subjects
Aqua Regia
Aqua regia
Electrodes
High temperature applications
High temperature stability
Lead zirconate titanate
Lead zirconate-titanate
MEMS
MEMS applications
Machinery
PLD-PZT
Photoresist mask
Photoresists
Piezoelectricity
Platinum
Platinum electrodes
Platinum patterning
Pt-electrode
Pulsed laser deposited lead zirconate titanate
Schottky barrier diodes
Silicon on insulator technology
Silicon wafers
Thick photoresist
Thick photoresists
Transducers
Wet etching
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