A Study on Organosilicon / Silicon Oxynitride Multilayered Barrier Structures to Improve Water Vapor Permeability and Step Coverage
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 103 === In this study, tetramethysilane(TMS), a mixed gas of ammonia and oxygen as source gases, etc., the use of plasma enhanced chemical vapor deposition system (PECVD), in the flexible plastic substrate and the silicon substrate manufacturing process, prepared a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/983ksh |