A Study on Organosilicon / Silicon Oxynitride Multilayered Barrier Structures to Improve Water Vapor Permeability and Step Coverage

by Shao-Kai Lu, 呂紹楷
Published 2015

Impact on the Gas Barrier Property of Silicon Oxide Films Prepared by Tetramethylsilane-Based PECVD Incorporating with Ammonia

by Hua-Wen Liu, Tai-Hong Chen, Chun-Hao Chang, Shao-Kai Lu, Yi-Cyuan Lin, Day-Shan Liu
Published 2017-01-01