直接奈米壓印金薄膜光柵成型性分析
碩士 === 國立中正大學 === 機械工程學系暨研究所 === 103 === The nanoimprint lithography for fabricating metallic nano-features on silicon or polymer substrate requires a series of complicated processes including repeated deposition, etching and lift-off. We developed an novel integrated direct nanoimprint process for...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39169311945720137430 |