Study on Structural and Gas Sensing Properties of MoO3 Thin Films Using Radio Frequency Sputtering
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 98 === Molybdenum trioxide (MoO3), which has phases of α-MoO3, β-MoO3, h-MoO3, is one of the gas sensing materials and a well-known catalyst. Gas sensing properties are influenced by the structure, shape, grain size, morphology. Specially, the resistivity changes...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15646110033316004218 |