The Synthesis of MOCVD Precursor CuII(OCHMeCH2NEt2)2 and Growth of Copper Thin Films
碩士 === 國立臺灣科技大學 === 化學工程系 === 94 === The volatile copper(II) complex CuII(OCHMeCH2NEt2)2 was synthesized. By the use of this CuII(OCHMeCH2NEt2)2 as a MOCVD precursor, highly conductive, conformal, continuous, nonporous, and pure copper thin films were deposited at various deposition temperatures and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/b44e9r |