Kinetics of Silicon Etching by Fluorine Atoms

Kinetics of Silicon Etching by Fluorine Atoms

碩士 === 國立臺灣科技大學 === 化學工程研究所 === 83 ===

Bibliographic Details
Main Authors:	Feng Lung Chang, 張豐隆
Other Authors:	Chiapyng Lee
Format:	Others
Language:	zh-TW
Published:	1995
Online Access:	http://ndltd.ncl.edu.tw/handle/95922845803154283373

Internet

http://ndltd.ncl.edu.tw/handle/95922845803154283373