Metrology of very thin silicon epitaxial films
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. === Includes bibliographical references (p. 135-139). === by Alexander Cherkassky. === Sc.D.
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2009
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| Online Access: | http://hdl.handle.net/1721.1/46178 |