Showing 1 - 2 results of 2 for search 'Cherkassky, Alexander (Alexander Peter), 1963-', query time: 0.03s Refine Results
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    Metrology of very thin silicon epitaxial films
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  2. 2
    Metrology of thin silicon expitaxial films : determination of epitaxial film thickness by Fourier-transform infra-red spectrometry
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