Development of An Automatic Approaching System for Electrochemical Nanofabrication Using Visual and Force-Displacement Sensing

Development of An Automatic Approaching System for Electrochemical Nanofabrication Using Visual and Force-Displacement Sensing

In this paper, a fast automatic precision approaching system is developed for electrochemical nanofabrication using visual and force-displacement sensing. Before the substrate is fabricated, the template should approach the substrate accurately to establish the initial gap between the template and s...

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Bibliographic Details
Main Authors: Lei-Jie Lai, Shi-Yu Zhou, Guo-Ying Gu, Li-Min Zhu
Format: Article
Language:English
Published: MDPI AG 2012-06-01
Series:Sensors
Subjects:
approaching
contact detection
displacement-force sensing module
flexure mechanism
visual sensing module
Online Access:http://www.mdpi.com/1424-8220/12/7/8465

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http://www.mdpi.com/1424-8220/12/7/8465

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