Resolution-Enhancing Structure for the Electric Field Microsensor Chip

Resolution-Enhancing Structure for the Electric Field Microsensor Chip

Electrostatic voltage is a vital parameter in industrial production lines, for reducing electrostatic discharge harms and improving yields. Due to such drawbacks as package shielding and low resolution, previously reported electric field microsensors are still not applicable for industrial static mo...

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Bibliographic Details
Main Authors: Xiaolong Wen, Pengfei Yang, Zhouwei Zhang, Zhaozhi Chu, Chunrong Peng, Yutao Liu, Shuang Wu, Bo Zhang, Fengjie Zheng
Format: Article
Language:English
Published: MDPI AG 2021-08-01
Series:Micromachines
Subjects:
electric field
electric field microsensor
package
vibrating capacitor
electrostatic charge
Online Access:https://www.mdpi.com/2072-666X/12/8/936

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https://www.mdpi.com/2072-666X/12/8/936

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