AC/DC Fields Demodulation Methods of Resonant Electric Field Microsensor

by Pengfei Yang, Xiaolong Wen, Zhaozhi Chu, Xiaoming Ni, Chunrong Peng
Published 2020-05-01

A High Sensitivity Electric Field Microsensor Based on Torsional Resonance

by Zhaozhi Chu, Chunrong Peng, Ren Ren, Biyun Ling, Zhouwei Zhang, Hucheng Lei, Shanhong Xia
Published 2018-01-01

Design, Fabrication and Characterization of a MEMS-Based Three-Dimensional Electric Field Sensor with Low Cross-Axis Coupling Interference

by Biyun Ling, Chunrong Peng, Ren Ren, Zhaozhi Chu, Zhouwei Zhang, Hucheng Lei, Shanhong Xia
Published 2018-03-01

An Electric Field Microsensor with Mutual Shielding Electrodes

by Hucheng Lei, Shanhong Xia, Zhaozhi Chu, Biyun Ling, Chunrong Peng, Zhouwei Zhang, Jun Liu, Wei Zhang
Published 2021-03-01

Resolution-Enhancing Structure for the Electric Field Microsensor Chip

by Xiaolong Wen, Pengfei Yang, Zhouwei Zhang, Zhaozhi Chu, Chunrong Peng, Yutao Liu, Shuang Wu, Bo Zhang, Fengjie Zheng
Published 2021-08-01