Computer modeling of processes of semiconductor technology through information-calculating system
An information-calculating system (ICS) that allows computer simulation of processes of semiconductor technology associated with the formation of single crystals and epitaxial heterostructures based on semiconductor AIIIBV compounds was developed. The ICS database covers 9 of AIIIBV compounds and so...
| Main Authors: | , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
MIREA - Russian Technological University
2015-06-01
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| Series: | Тонкие химические технологии |
| Subjects: | |
| Online Access: | https://www.finechem-mirea.ru/jour/article/view/239 |