The study of the mechanical properties of thin films using piezoceramic acoustic resonators
The paper describes a method for determining the properties of thin films: elastic constants, viscosity and density. The method is based on the analysis of changing the characteristics of the acoustic resonator, on the surface of which the film under study is deposited, in comparison with a free res...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2019-01-01
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| Series: | ITM Web of Conferences |
| Online Access: | https://www.itm-conferences.org/articles/itmconf/pdf/2019/07/itmconf_crimico2019_07002.pdf |