The study of the mechanical properties of thin films using piezoceramic acoustic resonators

by Teplykh Andrey, Zaitsev Boris, Borodina Irina, Semyonov Alexander, Ziangirova Mayya, Almyasheva Nailya, Golyshkin Alexander, Krasnopolskaya Larissa, Kuznetsova Iren
Published 2019-01-01