Development of a new hybrid approach combining AFM and SEM for the nanoparticle dimensional metrology

Development of a new hybrid approach combining AFM and SEM for the nanoparticle dimensional metrology

At this time, there is no instrument capable of measuring a nano-object along the three spatial dimensions with a controlled uncertainty. The combination of several instruments is thus necessary to metrologically characterize the dimensional properties of a nano-object. This paper proposes a new app...

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Bibliographic Details
Main Authors: Loïc Crouzier, Alexandra Delvallée, Sébastien Ducourtieux, Laurent Devoille, Guillaume Noircler, Christian Ulysse, Olivier Taché, Elodie Barruet, Christophe Tromas, Nicolas Feltin
Format: Article
Language:English
Published: Beilstein-Institut 2019-07-01
Series:Beilstein Journal of Nanotechnology
Subjects:
AFM
hybrid metrology
nanoparticles
SEM
size distribution
uncertainty budget
Online Access:https://doi.org/10.3762/bjnano.10.150

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