Development of a new hybrid approach combining AFM and SEM for the nanoparticle dimensional metrology

by Loïc Crouzier, Alexandra Delvallée, Sébastien Ducourtieux, Laurent Devoille, Guillaume Noircler, Christian Ulysse, Olivier Taché, Elodie Barruet, Christophe Tromas, Nicolas Feltin
Published 2019-07-01