Nano-precision metrology of X-ray mirrors with laser speckle angular measurement
A versatile high precision metrology instrument has been developed that surpass the limits of existing metrology techniques and opens up new possibilities to develop next-generation super-polished X-ray mirrors.
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2021-09-01
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| Series: | Light: Science & Applications |
| Online Access: | https://doi.org/10.1038/s41377-021-00632-4 |