Development of Unified Fabrication Process and Testing of MEMS Based Comb and Crab Type Capacitive Accelerometers for Navigational Applications
MEMS based accelerometers have already penetrated defense programs including navigation control in addition to their usual deployment in automotive, consumer and industrial markets because of their improved reliability, accuracy and excellent price performance. This paper discussed about the fabrica...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2016-08-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/august_2016/Vol_203/P_2846.pdf |