High speed silicon wet anisotropic etching for applications in bulk micromachining: a review
Abstract Wet anisotropic etching is extensively employed in silicon bulk micromachining to fabricate microstructures for various applications in the field of microelectromechanical systems (MEMS). In addition, it is most widely used for surface texturing to minimize the reflectance of light to impro...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
SpringerOpen
2021-02-01
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| Series: | Micro and Nano Systems Letters |
| Subjects: | |
| Online Access: | https://doi.org/10.1186/s40486-021-00129-0 |