Determination of precise crystallographic directions on Si{111} wafers using self-aligning pre-etched pattern

by Avvaru Venkata Narasimha Rao, Veerla Swarnalatha, Ashok Kumar Pandey, Prem Pal
Published 2018-06-01

High speed silicon wet anisotropic etching for applications in bulk micromachining: a review

by Prem Pal, Veerla Swarnalatha, Avvaru Venkata Narasimha Rao, Ashok Kumar Pandey, Hiroshi Tanaka, Kazuo Sato
Published 2021-02-01