On-Chip Integration of Pressure Plus 2-Axis (X/Z) Acceleration Composite TPMS Sensors with a Single-Sided Bulk-Micromachining Technique

On-Chip Integration of Pressure Plus 2-Axis (X/Z) Acceleration Composite TPMS Sensors with a Single-Sided Bulk-Micromachining Technique

A novel on-chip integration of pressure plus 2-axis (X/Z) acceleration composite sensors for upgraded production of automobile tire pressure monitoring system (TPMS) is proposed, developed, and characterized. Herein, the X-axis accelerometer is with the cantilever beam-mass structure and is used for...

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Bibliographic Details
Main Authors: Jiachou Wang, Fang Song
Format: Article
Language:English
Published: MDPI AG 2019-07-01
Series:Micromachines
Subjects:
two-axis (X/Z) accelerometer
pressure sensor
tire pressure monitoring system (TPMS)
on-chip integration
single-side bulk-micromachining process
Online Access:https://www.mdpi.com/2072-666X/10/7/473

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https://www.mdpi.com/2072-666X/10/7/473

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