On-Chip Integration of Pressure Plus 2-Axis (X/Z) Acceleration Composite TPMS Sensors with a Single-Sided Bulk-Micromachining Technique

by Jiachou Wang, Fang Song
Published 2019-07-01

A Front-Side Microfabricated Thermoresistive Gas Flow Sensor for High-Performance, Low-Cost and High-Yield Volume Production

by Dan Xue, Jiachou Wang, Xinxin Li
Published 2020-02-01

An Energy Harvester with Temperature Threshold Triggered Cycling Generation for Thermal Event Autonomous Monitoring

by Ruofeng Han, Nianying Wang, Qisheng He, Jiachou Wang, Xinxin Li
Published 2021-04-01

Design, Fabrication, and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer

by Shengran Cai, Wei Li, Hongshuo Zou, Haifei Bao, Kun Zhang, Jiachou Wang, Zhaohui Song, Xinxin Li
Published 2019-03-01