Microstructure and mechanical properties of atomic layer deposited alumina doped zirconia
Atomic layer deposited alumina doped zirconia films can exhibit advanced mechanical properties with potential to increase the suitability of ZrO2 films for mechanically resilient coatings. In the present study, Al2O3-doped ZrO2 films were deposited on a TiN substrate to thicknesses around 100 nm at...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-05-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0047572 |