Microstructure and mechanical properties of atomic layer deposited alumina doped zirconia

by Helle-Mai Piirsoo, Taivo Jõgiaas, Hugo Mändar, Peeter Ritslaid, Kaupo Kukli, Aile Tamm
Published 2021-05-01

Mechanical and Magnetic Properties of Double Layered Nanostructures of Tin and Zirconium Oxides Grown by Atomic Layer Deposition

by Aile Tamm, Helle-Mai Piirsoo, Taivo Jõgiaas, Aivar Tarre, Joosep Link, Raivo Stern, Kaupo Kukli
Published 2021-06-01

Magnetic and Electrical Performance of Atomic Layer Deposited Iron Erbium Oxide Thin Films

by Aile Tamm, Kristjan Kalam, Helina Seemen, Jekaterina Kozlova, Kaupo Kukli, Jaan Aarik, Joosep Link, Raivo Stern, Salvador Dueñas, Helena Castán
Published 2017-12-01

Atomic layer deposition and properties of mixed Ta2O5 and ZrO2 films

by Kaupo Kukli, Marianna Kemell, Marko Vehkamäki, Mikko J. Heikkilä, Kenichiro Mizohata, Kristjan Kalam, Mikko Ritala, Markku Leskelä, Ivan Kundrata, Karol Fröhlich
Published 2017-02-01

Atomic layer deposition and properties of ZrO2/Fe2O3 thin films

by Kristjan Kalam, Helina Seemen, Peeter Ritslaid, Mihkel Rähn, Aile Tamm, Kaupo Kukli, Aarne Kasikov, Joosep Link, Raivo Stern, Salvador Dueñas, Helena Castán, Héctor García
Published 2018-01-01