A Low-Power MEMS IDE Capacitor with Integrated Microhotplate: Application as Methanol Sensor using a Metal-Organic Framework Coating as Affinity Layer

A Low-Power MEMS IDE Capacitor with Integrated Microhotplate: Application as Methanol Sensor using a Metal-Organic Framework Coating as Affinity Layer

Capacitors made of interdigitated electrodes (IDEs) as a transducer platform for the sensing of volatile organic compounds (VOCs) have advantages due to their lower power operation and fabrication using standard micro-fabrication techniques. Integrating a micro-electromechanical system (MEMS), such...

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Bibliographic Details
Main Authors: Manjunath R. Venkatesh, Sumit Sachdeva, Brahim El Mansouri, Jia Wei, Andre Bossche, Duco Bosma, Louis C. P. M. de Smet, Ernst J. R. Sudhölter, Guo Qi Zhang
Format: Article
Language:English
Published: MDPI AG 2019-02-01
Series:Sensors
Subjects:
MEMS microhotplate
Capacitor interdigitated electrodes
ZIF-8
Online Access:https://www.mdpi.com/1424-8220/19/4/888

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https://www.mdpi.com/1424-8220/19/4/888

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