A Low-Power MEMS IDE Capacitor with Integrated Microhotplate: Application as Methanol Sensor using a Metal-Organic Framework Coating as Affinity Layer

by Manjunath R. Venkatesh, Sumit Sachdeva, Brahim El Mansouri, Jia Wei, Andre Bossche, Duco Bosma, Louis C. P. M. de Smet, Ernst J. R. Sudhölter, Guo Qi Zhang
Published 2019-02-01