Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers

• Main Authors: Gabriele Bosetti, Johannes Manz, Ulrich Krumbein, Gabriele Schrag
• Format: Article
• Language: English
• Published: MDPI AG 2018-11-01
• Series: Proceedings
• Subjects: MEMS transducers; acoustic high-frequency effects; compact model; multiphysics; system-level simulation; virtual prototyping
• Online Access: https://www.mdpi.com/2504-3900/2/13/1024

We present a fully coupled multi-energy domain compact model of a MEMS microphone dedicated to the investigation of acoustic high-frequency effects affecting the device behavior. To this end, the components of the acoustic domain are described using physics-derived analytical expressions. Finite element simulations are employed to confirm the validity of the acoustic submodel. The differential equations governing the small-signal dynamics of the electrically actuated transducer are solved in the frequency domain with MATLAB. The full-system model is calibrated and validated with experimental data. Measurements and simulations show very good agreement, which highlights the reliability of the presented modeling approach.