Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers

Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers

We present a fully coupled multi-energy domain compact model of a MEMS microphone dedicated to the investigation of acoustic high-frequency effects affecting the device behavior. To this end, the components of the acoustic domain are described using physics-derived analytical expressions. Finite ele...

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Bibliographic Details
Main Authors: Gabriele Bosetti, Johannes Manz, Ulrich Krumbein, Gabriele Schrag
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Proceedings
Subjects:
MEMS transducers
acoustic high-frequency effects
compact model
multiphysics
system-level simulation
virtual prototyping
Online Access:https://www.mdpi.com/2504-3900/2/13/1024

Internet

https://www.mdpi.com/2504-3900/2/13/1024

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