Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers

by Gabriele Bosetti, Johannes Manz, Ulrich Krumbein, Gabriele Schrag
Published 2018-11-01

A Comb-Based Capacitive MEMS Microphone with High Signal-to-Noise Ratio: Modeling and Noise-Level Analysis

by Sebastian Anzinger, Johannes Manz, Alfons Dehe, Gabriele Schrag
Published 2017-08-01