POSSIBILITY OF THE METASTABLE Al2O3 PHASE FORMATION Al3Si IN COMPOSITE Al-Si FILMS OBTAINED BY ION-BEAM AND MAGNETRON SPUTTERING
Abstract. This article describes the peculiarities of the phase composition and the electronic structure of composite Al0.75Si0.25 fi lms on a silicon substrate Si(100) obtained by magnetron and ion-beam sputtering. As a result of magnetron sputtering, Si nanocrystals with the sizes of ~25nm and met...
| Main Authors: | , , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Voronezh State University
2018-03-01
|
| Series: | Конденсированные среды и межфазные границы |
| Subjects: |