Structural Rearrangement of a-SiOx:H Films with Pulse Photon Annealing

by Vladimir A. Terekhov, Evgeny I. Terukov, Yury K. Undalov, Konstantin A. Barkov, Igor E. Zanin, Oleg V. Serbin, Irina N. Trapeznikova
Published 2020-12-01

POSSIBILITY OF THE METASTABLE Al2O3 PHASE FORMATION Al3Si IN COMPOSITE Al-Si FILMS OBTAINED BY ION-BEAM AND MAGNETRON SPUTTERING

by Vladimir A. Terekhov, Darya S. Usoltseva, Oleg V. Serbin, Igor’ E. Zanin, Tatyana V. Kulikova, Dmitrij N. Nesterov, Konstantin A. Barkov, Aleksandr V. Sitnikov, Sergey K. Lazaruk, Evelina P. Domashevskaja
Published 2018-03-01