Structural properties of the formation of zinc-containing nanoparticles obtained by ion implantation in Si (001) and subsequent thermal annealing
This work deals with the study of structural transformations in the near-surface layers of silicon after ion beam synthesis of zinc-containing nanoparticles. Phase formation after implantation of Zn+ ions and two-stage implantation of O+ and Zn+ ions with subsequent thermal annealing in an atmospher...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Pensoft Publishers
2017-09-01
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| Series: | Modern Electronic Materials |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2452177917300749 |