Structural properties of the formation of zinc-containing nanoparticles obtained by ion implantation in Si (001) and subsequent thermal annealing

Structural properties of the formation of zinc-containing nanoparticles obtained by ion implantation in Si (001) and subsequent thermal annealing

This work deals with the study of structural transformations in the near-surface layers of silicon after ion beam synthesis of zinc-containing nanoparticles. Phase formation after implantation of Zn+ ions and two-stage implantation of O+ and Zn+ ions with subsequent thermal annealing in an atmospher...

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Bibliographic Details
Main Authors: Ksenia B. Eidelman, Nataliya Yu. Tabachkova, Kirill D. Shcherbachev, Yuri N. Parkhomenko, Vladimir V. Privesentsev, Denis M. Migunov
Format: Article
Language:English
Published: Pensoft Publishers 2017-09-01
Series:Modern Electronic Materials
Subjects:
Ion implantation
Zinc-containing nanoparticles
Core-shell nanoparticles
Willemite
Online Access:http://www.sciencedirect.com/science/article/pii/S2452177917300749

Internet

http://www.sciencedirect.com/science/article/pii/S2452177917300749

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