Design ICCreatech semiconductor wafer accounting and probe measurement automatization software
The different manufacturing processes automatization and creating a modern digital document transferring system is an important problem for enhancing factory performance. This paper presents the results of developing an automated information system for manufacturing monolithic integrated circuits. S...
Main Authors: | Argunov Dmitry, Shiryaev Boris, Bezruk Alexey, Yushenko Alexey |
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Format: | Article |
Language: | English |
Published: |
EDP Sciences
2019-01-01
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Series: | ITM Web of Conferences |
Online Access: | https://www.itm-conferences.org/articles/itmconf/pdf/2019/07/itmconf_crimico2019_04009.pdf |
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