Design ICCreatech semiconductor wafer accounting and probe measurement automatization software

The different manufacturing processes automatization and creating a modern digital document transferring system is an important problem for enhancing factory performance. This paper presents the results of developing an automated information system for manufacturing monolithic integrated circuits. S...

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Bibliographic Details
Main Authors: Argunov Dmitry, Shiryaev Boris, Bezruk Alexey, Yushenko Alexey
Format: Article
Language:English
Published: EDP Sciences 2019-01-01
Series:ITM Web of Conferences
Online Access:https://www.itm-conferences.org/articles/itmconf/pdf/2019/07/itmconf_crimico2019_04009.pdf