$High Performance Metal-Gate/High-<inline-formula> <tex-math notation="LaTeX">${\kappa } $ </tex-math></inline-formula> GaN MOSFET With Good Reliability for Both Logic and Power Applications$

High Performance Metal-Gate/High-<inline-formula> <tex-math notation="LaTeX">${\kappa } $ </tex-math></inline-formula> GaN MOSFET With Good Reliability for Both Logic and Power Applications

The gate-recessed GaN MOSFET on a Si substrate is demonstrated to achieve a record highest normalized transistor current (μC<sub>ox</sub>) of 335 μA/V<sup>2</sup> (410 mA/mm at L<sub>G</sub> = 5 μm and only V<sub>G</sub>...

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Bibliographic Details
Main Authors:	Shih-Han Yi, Dun-Bao Ruan, Shaoyan Di, Xiaoyan Liu, Yung Hsien Wu, Albert Chin
Format:	Article
Language:	English
Published:	IEEE 2016-01-01
Series:	IEEE Journal of the Electron Devices Society
Subjects:	GaN MOSFET high- $\kappa $ reliability interface
Online Access:	https://ieeexplore.ieee.org/document/7527612/

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