High Performance Metal-Gate/High-<inline-formula> <tex-math notation="LaTeX">${\kappa } $ </tex-math></inline-formula> GaN MOSFET With Good Reliability for Both Logic and Power Applications

The gate-recessed GaN MOSFET on a Si substrate is demonstrated to achieve a record highest normalized transistor current (&#x03BC;C<sub>ox</sub>) of 335 &#x03BC;A/V<sup>2</sup> (410 mA/mm at L<sub>G</sub> = 5 &#x03BC;m and only V<sub>G</sub>...

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Bibliographic Details
Main Authors: Shih-Han Yi, Dun-Bao Ruan, Shaoyan Di, Xiaoyan Liu, Yung Hsien Wu, Albert Chin
Format: Article
Language:English
Published: IEEE 2016-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
GaN
Online Access:https://ieeexplore.ieee.org/document/7527612/