Influence of the Secondary Ion Beam Source on the Laser Damage Mechanism and Stress Evolution of IBS Hafnia Layers

by Igor Stevanovic, Zoltán Balogh-Michels, Andreas Bächli, Valentin J. Wittwer, Thomas Südmeyer, Alexander Stuck, Thomas Gischkat
Published 2021-12-01

Crystallization behavior of ion beam sputtered HfO2 thin films and its effect on the laser-induced damage threshold

by Zoltán Balogh-Michels, Igor Stevanovic, Aurelio Borzi, Andreas Bächli, Daniel Schachtler, Thomas Gischkat, Antonia Neels, Alexander Stuck, Roelene Botha
Published 2021-03-01

Substrate Cleaning Processes and Their Influence on the Laser Resistance of Anti-Reflective Coatings

by Thomas Gischkat, Daniel Schachtler, Igor Stevanovic, Zoltan Balogh-Michels, Roelene Botha, Andreas Bächli, Marco Cucinelli, André Mocker, Martin Gutsche, Sven Günther, Philipp Alder, Bernd Eiermann
Published 2020-11-01